Photoresists Innovations and Patents


© 2002, XQ23.COM Research

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Capacitor charging

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Pattern forming

Pattern forming material

Photoionization

Photopolymers

Photoresists

Projection exposure

Pulse smoothing

Pulse stretching

Pulsed laser

Pulsed power

Quantum Optics

Revascularization

Self-trapping

Semiconductor devices

Thin film transistors

Trace analysis

UV Mirror

chemical-amplification

self-focusing

semiconductor thin film

transfer dyes

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Recent U.S. patents related to Photoresists:

6,388,226: Toroidal low-field reactive gas source
6,388,185: Microfabricated thermoelectric power-generation devices
6,388,036: Oligomerization, polymerization and copolymerization of substituted and unsubstituted .alpha.-methylene-.gamma.-butyrolactones and products thereof
6,387,783: Methods of T-gate fabrication using a hybrid resist
6,387,751: Method of manufacturing semiconductor device having high-density capacitor elements
6,387,597: Method for exposing features on non-planar resists
6,387,593: Self-trapping and self-focusing of optical beams in photopolymers
6,387,590: Positive photoresist composition
6,387,589: Photoresist polymers and photoresist compositions containing the same
6,385,863: Process and device for drying disk-like objects
6,384,971: Methods for manufacturing micropolarizers
6,384,509: Semiconductor device
6,384,481: Single step electroplating process for interconnect via fill and metal line patterning
6,384,264: Photoactive materials applicable to imaging systems
6,384,172: Hyperbranched polycarbosilanes, polycarbosiloxanes, polycarbosilazenes and copolymers thereof
6,383,947: Anti-reflective coating used in the fabrication of microcircuit structures in 0.18 micron and smaller technologies
6,383,941: Method of etching organic ARCs in patterns having variable spacings
6,383,931: Convertible hot edge ring to improve low-K dielectric etch
6,383,926: Method of manufacturing a transistor
6,383,912: Fabrication method of integrated circuits with multiple low dielectric-constant intermetal dielectrics
6,383,724: Organic removal process
6,383,723: Method to clean substrate and improve photoresist profile
6,383,712: Polymer-bound sensitizer
6,383,696: Methods of forming a face plate assembly of a color display
6,383,401: Method of producing flex circuit with selectively plated gold
6,383,329: Apparatus and method for removing a label from a surface with a chilled medium
6,383,289: Apparatus for liquid carbon dioxide systems
6,381,873: Method for drying a polymer coating on a substrate
6,381,166: Semiconductor memory device having variable pitch array
6,380,611: Treatment for film surface to reduce photo footing
6,380,317: Production of acetal derivatized hydroxyl aromatic polymers and their use in radiation sensitive formulations
6,380,270: Photogenerated nanoporous materials
6,380,067: Method for creating partially UV transparent anti-reflective coating for semiconductors
6,379,883: Microfabricated aperture-based sensor
6,379,875: Stripper pretreatment
6,379,874: Using block copolymers as supercritical fluid developable photoresists
6,379,870: Method for determining side wall oxidation of low-k materials
6,379,869: Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning
6,379,865: Photoimageable, aqueous acid soluble polyimide polymers
6,379,862: Radiation-sensitive resin composition
6,379,861: Polymers and photoresist compositions comprising same
6,379,860: Positive photosensitive composition
6,379,796: Composite hollow fiber membrane
6,379,551: Method of removing metal ions using an ion exchange membrane
6,378,907: Connector apparatus and system including connector apparatus
6,376,392: PECVD process for ULSI ARL
6,376,385: Method of manufacturing assembly for plasma reaction chamber and use thereof
6,376,151: Positive resist composition
6,376,149: Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
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6,348,683: Quasi-optical transceiver having an antenna with time varying voltage
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More information on:  Photoresists and   Photoresists Research References.



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 Excimer Lasers & Related Sources

Excimer Laser
Dimitri T. Azar
cover X-Rays from Laser Plasmas
I. C. E. Turcu
 
cover The Excimer Manual
Jonathan H., Md. 


cover Excimer Laser Surgery for Corneal Disorders
Peter S. Hersh


The Laser Cookbook
by Gordon McComb
Introduction to Laser Technology, 3r
by C. Breck Hitz
Lasers
by Anthony E. Siegman
Laser Material Processing
by W. M. Steen
Handbook of Interventional Radiology
by Myron Wojtowycz
Chemical Aspects of Photodynamic Theory
by Raymond Bonnett
Pulsed Laser Deposition of Thin Films
by Douglas B. Chrisey

 

Excimer Lasers
Lucien D. Laude  
cover High-Power Lasers
Sui-Sheng Mei  
cover Short-Wavelength Lasers and Their Applications
C. Yamanaka

Beauty and the Beam
by Deborah S. Sarnoff
Handbook of Interventional Radiology
by Myron Wojtowycz
Shoebox Holography
by Frank Defreitas
Diode Lasers and Photonic Integrated Circuits
by Larry A. Coldren
Fundamentals of Microfabricati
by Marc J. Madou
Laser Material Processing
by W. M. Steen
Solid-State Laser Engineering
by Walter Koechner
Introduction to Laser Technology, 3r
by C. Breck Hitz

Laser Satellite Communication
William H. Mott

Lasers, Ray Guns and Light Cannons!
by Gordon McComb

cover The Blue Laser Diode
Shuji Nakamura 

cover Ultraviolet Laser Technology and Applications
David J. Elliott
cover Advanced Laser Processing of Materials
Rajiv Singh

Optical Scattering
John C. Stover

Light in Flight or the Holodiagram
Nils Abramson

Laser Beam Scintillation With Applications
Larry C. Andrews

Handbook of Laser Wavelengths
Marvin John Weber

Atom Optics with Laser Light
V. I. Balykin

Laser Speckle and Related Phenomena ...
J.C. Dainty

Dynamics of Lasers
C.O. Weiss

Ultra-wideband coherent optical LANs...
Springer-Verlag

Solid-State Laser Engineering
Walter Koechner

Femtosecond Laser Pulses
Claude Rulliere

Selected Papers on Photopolymers
Roger A. Lessard

Polymers in Optics
Roger A. Lessard

Photoreactive Polymers
Arnost Reiser