6,389,045: Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers
6,388,823: Optical system, especially a projection light facility for microlithography
6,388,736: Imaging method using phase boundary masking with modified illumination
6,388,261: Charged-particle-beam microlithography apparatus and methods exhibiting reduced astigmatisms and linear distortion
6,388,253: Integrated critical dimension control for semiconductor device manufacturing
6,387,602: Apparatus and method of cleaning reticles for use in a lithography tool
6,387,601: Method for manufacturing an ink jet recording head, and an ink jet recording head manufactured by such method
6,387,593: Self-trapping and self-focusing of optical beams in photopolymers
6,387,442: Ballistic aerosol marking process employing marking material comprising polyester resin and poly(3,4-ethylenedioxypyrrole)
6,385,498: Manufacturing method for microlithography apparatus
6,384,465: Semiconductor device and method of manufacturing the same
6,383,723: Method to clean substrate and improve photoresist profile
6,383,561: Ballistic aerosol marking process employing marking material comprising vinyl resin and poly(3,4-ethylenedioxythiophene)
6,381,392: Ion exchange technology for fabrication of waveguide source lasers
6,381,256: Molecular fluorine laser with spectral linewidth of less than 1 pm
6,381,169: High density non-volatile memory device
6,381,072: Lenslet array systems and methods
6,381,013: Test slide for microscopes and method for the production of such a slide
6,380,339: Silicon-containing vinyl copolymer and resist composition containing the same
6,380,048: Die paddle enhancement for exposed pad in semiconductor packaging
6,379,860: Positive photosensitive composition
6,379,847: Electrically programmable photolithography mask
6,379,744: Method for coating an integrated circuit substrate
6,379,572: Flat panel display with spaced apart gate emitter openings
6,379,551: Method of removing metal ions using an ion exchange membrane
6,378,337: Method for producing bulk fused silica
6,378,123: Method of handling macro components in circuit design synthesis
6,376,984: Patterned heat conducting photocathode for electron beam source
6,376,967: Inertial/audio unit and construction
6,376,848: Apparatus and methods for charged-particle-beam microlithography exhibiting reduced aberrations caused by beam deflection to correct errors in stage-position control
6,376,842: Optical system for charged-particle-beam microlithography apparatus exhibiting reduced third- and fifth-order aberrations
6,376,149: Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
6,376,137: Charged-particle-beam microlithography apparatus and methods including correction of stage-positioning errors using a deflector
6,375,903: Method and apparatus for synthesis of arrays of DNA probes
6,375,551: Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms
6,373,869: System and method for generating coherent radiation at ultraviolet wavelengths
6,373,071: Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography
6,372,854: Hydrogenated ring-opening metathesis polymer and its use and production
6,372,391: Template mask lithography utilizing structured beam
6,371,134: Ozone cleaning of wafers
6,370,679: Data hierarchy layout correction and verification method and apparatus
6,369,874: Photoresist outgassing mitigation system method and apparatus for in-vacuum lithography
6,369,143: Polymer for radiation-sensitive resist and resist composition containing the same
6,368,883: Method for identifying and controlling impact of ambient conditions on photolithography processes
6,368,871: Non-planar microstructures for manipulation of fluid samples
6,368,763: Method of detecting aberrations of an optical imaging system
6,368,421: Composition for stripping photoresist and organic materials from substrate surfaces
6,368,400: Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography
6,368,275: Method and apparatus for diagnostic medical information gathering, hyperthermia treatment, or directed gene therapy
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