Lithography Innovations and Patents


© 2002, XQ23.COM Research

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Recent U.S. patents related to Lithography:

6,389,189: Fluid-encapsulated MEMS optical switch
6,389,107: Capillary polarimeter
6,389,106: Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge
6,389,052: Laser gas replenishment method
6,389,045: Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers
6,388,922: Semiconductor memory and method of operating semiconductor memory
6,388,918: High efficiency miniature magnetic integrated circuit structures
6,388,916: Magnetoelectronic memory element with isolation element
6,388,823: Optical system, especially a projection light facility for microlithography
6,388,799: Optical device and imaging system
6,388,736: Imaging method using phase boundary masking with modified illumination
6,388,720: Liquid crystal display including signal electrodes connected to each other by first anode oxide electrode and auxiliary electrode connected to second anode oxide electrode
6,388,533: Programmable ring oscillator
6,388,516: Precision high speed magnetic coil driver circuit
6,388,387: Optical element
6,388,372: Display screen
6,388,341: Semiconductor device
6,388,303: Semiconductor device and semiconductor device manufacture method
6,388,294: Integrated circuit using damascene gate structure
6,388,293: Nonvolatile memory cell, operating method of the same and nonvolatile memory array
6,388,290: Single crystal silicon on polycrystalline silicon integrated circuits
6,388,285: Feram cell with internal oxygen source and method of oxygen release
6,388,226: Toroidal low-field reactive gas source
6,388,205: Printed circuit board with shielded circuitry
6,388,198: Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality
6,388,185: Microfabricated thermoelectric power-generation devices
6,388,044: Polyether resin and coating solution for forming insulation film
6,387,851: Micro-fabrication method and equipment thereby
6,387,808: Method of correcting topographical effects on a micro-electronic substrate
6,387,798: Method of etching trenches for metallization of integrated circuit devices with a narrower width than the design mask profile
6,387,792: Method of fabricating a dielectric antifuse structure
6,387,791: Method for manufacturing microscopic canals within a semiconductor
6,387,790: Conversion of amorphous layer produced during IMP Ti deposition
6,387,787: Lithographic template and method of formation and use
6,387,785: Lithography and etching process
6,387,783: Methods of T-gate fabrication using a hybrid resist
6,387,781: Method of forming three-dimensional semiconductors structures
6,387,771: Low temperature oxidation of conductive layers for semiconductor fabrication
6,387,756: Manufacturing method of non-volatile semiconductor device
6,387,740: Tri-layer process for forming TFT matrix of LCD with reduced masking steps
6,387,717: Field emission tips and methods for fabricating the same
6,387,713: Method for manufacturing microfabrication apparatus
6,387,602: Apparatus and method of cleaning reticles for use in a lithography tool
6,387,600: Protective layer during lithography and etch
6,387,598: Pattern forming material and pattern forming method
6,387,596: Method of forming resist images by periodic pattern removal
6,387,595: On-press developable lithographic printing plate having an ultrathin overcoat
6,387,593: Self-trapping and self-focusing of optical beams in photopolymers
6,387,592: Pattern forming material and pattern forming method
6,091,522: Acousto-optic channelizer-based ultra-wideband signal processor
6,081,543: Stretcher-compressor assembly having a single grating
6,078,835: Pacemaker wherein emission of stimulation pulses is controlled dependent on stretching of the ventricular wall
6,078,606: Multi-color, multi-pulse laser
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More information on:  Lithography and   Lithography Research References.



More information on:  Lithography and   Lithography Research References.

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 Excimer Lasers & Related Sources

Excimer Laser
Dimitri T. Azar
cover X-Rays from Laser Plasmas
I. C. E. Turcu
 
cover The Excimer Manual
Jonathan H., Md. 


cover Excimer Laser Surgery for Corneal Disorders
Peter S. Hersh


The Laser Cookbook
by Gordon McComb
Introduction to Laser Technology, 3r
by C. Breck Hitz
Lasers
by Anthony E. Siegman
Laser Material Processing
by W. M. Steen
Handbook of Interventional Radiology
by Myron Wojtowycz
Chemical Aspects of Photodynamic Theory
by Raymond Bonnett
Pulsed Laser Deposition of Thin Films
by Douglas B. Chrisey

 

Excimer Lasers
Lucien D. Laude  
cover High-Power Lasers
Sui-Sheng Mei  
cover Short-Wavelength Lasers and Their Applications
C. Yamanaka

Beauty and the Beam
by Deborah S. Sarnoff
Handbook of Interventional Radiology
by Myron Wojtowycz
Shoebox Holography
by Frank Defreitas
Diode Lasers and Photonic Integrated Circuits
by Larry A. Coldren
Fundamentals of Microfabricati
by Marc J. Madou
Laser Material Processing
by W. M. Steen
Solid-State Laser Engineering
by Walter Koechner
Introduction to Laser Technology, 3r
by C. Breck Hitz

Laser Satellite Communication
William H. Mott

Lasers, Ray Guns and Light Cannons!
by Gordon McComb

cover The Blue Laser Diode
Shuji Nakamura 

cover Ultraviolet Laser Technology and Applications
David J. Elliott
cover Advanced Laser Processing of Materials
Rajiv Singh

Optical Scattering
John C. Stover

Light in Flight or the Holodiagram
Nils Abramson

Laser Beam Scintillation With Applications
Larry C. Andrews

Handbook of Laser Wavelengths
Marvin John Weber

Atom Optics with Laser Light
V. I. Balykin

Laser Speckle and Related Phenomena ...
J.C. Dainty

Dynamics of Lasers
C.O. Weiss

Ultra-wideband coherent optical LANs...
Springer-Verlag

Solid-State Laser Engineering
Walter Koechner

Femtosecond Laser Pulses
Claude Rulliere

Selected Papers on Photopolymers
Roger A. Lessard

Polymers in Optics
Roger A. Lessard

Photoreactive Polymers
Arnost Reiser