6,389,189: Fluid-encapsulated MEMS optical switch
6,389,107: Capillary polarimeter
6,389,106: Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge
6,389,052: Laser gas replenishment method
6,389,045: Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers
6,388,922: Semiconductor memory and method of operating semiconductor memory
6,388,918: High efficiency miniature magnetic integrated circuit structures
6,388,916: Magnetoelectronic memory element with isolation element
6,388,823: Optical system, especially a projection light facility for microlithography
6,388,799: Optical device and imaging system
6,388,736: Imaging method using phase boundary masking with modified illumination
6,388,720: Liquid crystal display including signal electrodes connected to each other by first anode oxide electrode and auxiliary electrode connected to second anode oxide electrode
6,388,533: Programmable ring oscillator
6,388,516: Precision high speed magnetic coil driver circuit
6,388,387: Optical element
6,388,372: Display screen
6,388,341: Semiconductor device
6,388,303: Semiconductor device and semiconductor device manufacture method
6,388,294: Integrated circuit using damascene gate structure
6,388,293: Nonvolatile memory cell, operating method of the same and nonvolatile memory array
6,388,290: Single crystal silicon on polycrystalline silicon integrated circuits
6,388,285: Feram cell with internal oxygen source and method of oxygen release
6,388,226: Toroidal low-field reactive gas source
6,388,205: Printed circuit board with shielded circuitry
6,388,198: Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality
6,388,185: Microfabricated thermoelectric power-generation devices
6,388,044: Polyether resin and coating solution for forming insulation film
6,387,851: Micro-fabrication method and equipment thereby
6,387,808: Method of correcting topographical effects on a micro-electronic substrate
6,387,798: Method of etching trenches for metallization of integrated circuit devices with a narrower width than the design mask profile
6,387,792: Method of fabricating a dielectric antifuse structure
6,387,791: Method for manufacturing microscopic canals within a semiconductor
6,387,790: Conversion of amorphous layer produced during IMP Ti deposition
6,387,787: Lithographic template and method of formation and use
6,387,785: Lithography and etching process
6,387,783: Methods of T-gate fabrication using a hybrid resist
6,387,781: Method of forming three-dimensional semiconductors structures
6,387,771: Low temperature oxidation of conductive layers for semiconductor fabrication
6,387,756: Manufacturing method of non-volatile semiconductor device
6,387,740: Tri-layer process for forming TFT matrix of LCD with reduced masking steps
6,387,717: Field emission tips and methods for fabricating the same
6,387,713: Method for manufacturing microfabrication apparatus
6,387,602: Apparatus and method of cleaning reticles for use in a lithography tool
6,387,600: Protective layer during lithography and etch
6,387,598: Pattern forming material and pattern forming method
6,387,596: Method of forming resist images by periodic pattern removal
6,387,595: On-press developable lithographic printing plate having an ultrathin overcoat
6,387,593: Self-trapping and self-focusing of optical beams in photopolymers
6,387,592: Pattern forming material and pattern forming method
6,091,522: Acousto-optic channelizer-based ultra-wideband signal processor
6,081,543: Stretcher-compressor assembly having a single grating
6,078,835: Pacemaker wherein emission of stimulation pulses is controlled dependent on stretching of the ventricular wall
6,078,606: Multi-color, multi-pulse laser
:
More information on:
Lithography
and
Lithography Research
References.